发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, PRINTED CIRCUIT BOARD, AND METHOD FOR MANUFACTURING THE PRINTED CIRCUIT BOARD
摘要 <p>Disclosed is a method for manufacturing a semiconductor device that is free from the occurrence of a deterioration in substrate quality and defects.  The method comprises the steps of forming concaves (115) on a P-type silicon substrate (101), forming an N-type diffusion layer (102) containing N-type impurities on the surface of the P-type silicon substrate (101), and exposing the area other than the concaves (115) in the P-type silicon substrate (101) to a treatment fluid of a gas phase or a liquid phase containing a chemical species that can be rendered active, whereby the surface of the assembly is treated to have properties different from the properties of the concaves (115).</p>
申请公布号 WO2010140224(A1) 申请公布日期 2010.12.09
申请号 WO2009JP60090 申请日期 2009.06.02
申请人 MITSUBISHI ELECTRIC CORPORATION;NIINOBE, DAISUKE;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU 发明人 NIINOBE, DAISUKE;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU
分类号 H01L21/306;H01L31/04;H05K1/02;H05K3/34 主分类号 H01L21/306
代理机构 代理人
主权项
地址