发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, PRINTED CIRCUIT BOARD, AND METHOD FOR MANUFACTURING THE PRINTED CIRCUIT BOARD |
摘要 |
<p>Disclosed is a method for manufacturing a semiconductor device that is free from the occurrence of a deterioration in substrate quality and defects. The method comprises the steps of forming concaves (115) on a P-type silicon substrate (101), forming an N-type diffusion layer (102) containing N-type impurities on the surface of the P-type silicon substrate (101), and exposing the area other than the concaves (115) in the P-type silicon substrate (101) to a treatment fluid of a gas phase or a liquid phase containing a chemical species that can be rendered active, whereby the surface of the assembly is treated to have properties different from the properties of the concaves (115).</p> |
申请公布号 |
WO2010140224(A1) |
申请公布日期 |
2010.12.09 |
申请号 |
WO2009JP60090 |
申请日期 |
2009.06.02 |
申请人 |
MITSUBISHI ELECTRIC CORPORATION;NIINOBE, DAISUKE;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU |
发明人 |
NIINOBE, DAISUKE;NISHIMURA, KUNIHIKO;MATSUNO, SHIGERU |
分类号 |
H01L21/306;H01L31/04;H05K1/02;H05K3/34 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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