| 摘要 |
In a microwave plasma processing apparatus, when a surface of a planar antenna 31 for radiating a microwave to form a plasma is concentrically divided into a central region 31a, an outer circumferential region 31c and a middle region 31b therebetween, a plurality of pairs of microwave radiating holes 32 elongated in different directions are concentrically arranged in the central region 31a and the outer circumferential region 31c and no microwave radiating hole is formed in the middle region 31b, and a microwave radiating surface of a microwave transmitting plate 28 is provided with a concave portion 28a.
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