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发明名称
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
摘要
申请公布号
KR20100111692(A)
申请公布日期
2010.10.15
申请号
KR20107015534
申请日期
2008.12.12
申请人
LAM RESEARCH CORPORATION
发明人
MUI DAVID S. L.;SRINIVASAN SATISH;PENG GRANT;ZHU JI;KON SHIH CHUNG;PODLESNIK DRAGAN;MENDIRATTA ARJUN
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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