SMALL LOOP ANTENNA FOR RFID TAG AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An RFID tag miniaturized loop antenna and a manufacturing method thereof are provided to implement the miniaturized surface mounted device by forming a single chip using semiconductor process. CONSTITUTION: A substrate of a silicon and oxide silicon structure is offered. The antenna is embodied on the substrate in the form of the spiral loop. The line width(W1) of the antenna loop is 50~150um. The line consisting the antenna roof is made of the aluminum foil of about 2 um thickness. The self resonant frequency of the loop antenna is 100MHz or greater.