| 摘要 |
A method for manufacturing a capacitance sensor comprises the steps of (a) depositing a film to be a diaphragm forming a moving electrode, (b) heating the film to be the diaphragm to a first temperature, and (c) depositing a film to be a plate forming a fixed electrode opposing to the moving electrode. Stresses of the diaphragm and the plate of the capacitance sensor are optimized.
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