| 摘要 |
The present invention is a heat processing method comprising: a placement step in which an object to be processed is placed on a stage disposed in a processing vessel whose inside atmosphere is capable of being discharged; and a heat processing step that is performed after the placement step, in which a temperature of the object to be processed is elevated to a predetermined set temperature and is maintained thereat by a heating unit that is activated by a power supply, and in which a predetermined gas is caused to flow into the processing vessel so as to perform a predetermined heat process to the object to be processed; wherein, immediately before the heat processing step, there is performed at least once a brief large-power supply step, in which a power larger than that to be supplied to the heating unit for maintaining the temperature of the object to be processed in the heat processing step is briefly supplied to the heating unit. |
