发明名称 SEMICONDUCTOR LIGHT-EMITTING ELEMENT ARRAY AND MANUFACTURING METHOD THEREOF
摘要 Semiconductor surface emitting elements having a plurality of wavelengths being manufactured on a signal substrate through MOVPE selective growth. More specifically, provided is a semiconductor light emitting element array which comprises; a semiconductor crystal substrate; an insulating film disposed on a surface of the substrate, the insulating film being divided into two or more regions, each of which having two or more openings exposing the surface of the substrate; semiconductor rods extending from the surface of the substrate upward through the openings, the semiconductor rods each having an n-type semiconductor layer and a p-type semiconductor layer being laminated in its extending direction, thereby providing a p-n junction; a first electrode connected to the semiconductor crystal substrate; and a second electrode connected to upper portions of the semiconductor rods; wherein the heights of the semiconductor rods as measured from the substrate surface vary by each of the two or more regions.
申请公布号 US2011204327(A1) 申请公布日期 2011.08.25
申请号 US200813124493 申请日期 2008.10.17
申请人 NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY 发明人 HIRUMA KENJI;HARA SHINJIRO;MOTOHISA JUNICHI;FUKUI TAKASHI
分类号 H01L33/06;H01L33/08 主分类号 H01L33/06
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