发明名称 |
TESTING APPARATUS FOR ELECTRONIC DEVICES |
摘要 |
A wafer processing apparatus used for the testing of electronic devices comprises first and second clampers movably mounted on a shaft, each clamper being configured for holding a wafer carrier on which a wafer is mounted. Clamping fingers on each of the first and second clampers are operative to clamp onto the wafer carrier to hold the wafer carriers, and the clampers are operative to move the wafer carriers reciprocally between a loading position and a wafer processing location for processing the wafers.
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申请公布号 |
US2011248738(A1) |
申请公布日期 |
2011.10.13 |
申请号 |
US201113079074 |
申请日期 |
2011.04.04 |
申请人 |
SZE CHAK TONG;TSAI PEI WEI;CHAN TIN YI;SIZTO WAI HONG;CHEUK CHO HIN |
发明人 |
SZE CHAK TONG;TSAI PEI WEI;CHAN TIN YI;SIZTO WAI HONG;CHEUK CHO HIN |
分类号 |
G01R31/20;H01L21/677 |
主分类号 |
G01R31/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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