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发明名称
SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
KR101087476(B1)
申请公布日期
2011.11.25
申请号
KR20100024027
申请日期
2010.03.18
申请人
发明人
分类号
H01L27/115;H01L21/768;H01L21/8247
主分类号
H01L27/115
代理机构
代理人
主权项
地址
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