| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve an ejection precision by precisely forming a boundary between a hydrophilic nozzle hole inner surface and a water-repellent nozzle plate surface (ejection face). <P>SOLUTION: The manufacturing method of the nozzle plate includes the step of forming a dent shape of a non-penetrating state to a position to be formed with a nozzle of a first face of a substrate, the step of forming a first film 300 on a surface of the dent shape, the step of exposing the first film 300 in a protrusion shape by performing etching to a second face which is an opposite face to the first face, the step of forming a second film 340 on the second face, a process of forming a hole part by etching the first film 300 and second film 340 until a part of the protrusion shape of the first film 300 penetrates, and the step of giving a water repellency 342 at least to the periphery of an opening 350 of the hole part of the second face side surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
