| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of producing a functional film, which subjects a base material to film formation process or the like by: using a laminate configured by applying a protective film to the base material; and peeling the protective film off in vacuum, wherein the protective film is prevented from being peeled off from the base material due to a gas remaining between the base material and the protective film, and the peeling electrification that obstructs a process for the base material is prevented. <P>SOLUTION: The protective film 14 on which through-holes are formed while scattered all over the surface of the protective film. Moreover the application area of the protective film 14 and base material 12 is reduced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
