| 摘要 |
PURPOSE: A linear stage is provided to be made of a ceramic material which is strong against thermal deformation, thereby increasing micro control and accuracy. CONSTITUTION: A rail(20) has a rectangular tube shape and is made of ceramic materials. Right and right plates(50,60) have rectangular ceramic block shapes and contact the right side of a left rail(20a) and the left side of a right rail. A circular porous ceramic object(61) includes a metal plate(62). An air discharging groove(53,63) is formed on the central part of a body. An upper plate(70) is made of a ceramic plate shape coupled with the upper surfaces of the right and right plates. |
