发明名称 RESISTANCE CHANGE MEMORY
摘要 <P>PROBLEM TO BE SOLVED: To provide a resistance change memory capable of making a cell size microfine. <P>SOLUTION: A resistance change memory 10 includes: a plurality of word lines extending in a first direction; first to third bit lines extending in a second direction; a plurality of variable resistance elements 20 connected to the first and third bit lines; a plurality of active regions AA provided in a semiconductor substrate 30 and extending in a diagonal direction; a plurality of selection transistors 21 provided in the plural active regions AA and connected to the variable resistance elements 20; and a plurality of contact plugs 37 connecting the selection transistors and the third bit line. The plural variable resistance elements 20 comprise a group of first variable resistance elements arranged below the first bit line and between the plural word lines in line with the second direction; and a group of second variable resistance elements arranged below the third bit line and between the plural word lines in line with the second direction. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012204399(A) 申请公布日期 2012.10.22
申请号 JP20110064925 申请日期 2011.03.23
申请人 TOSHIBA CORP 发明人 WATANABE TOSHIHARU;ASAO YOSHIAKI
分类号 H01L27/105;H01L21/8246;H01L29/82;H01L43/08 主分类号 H01L27/105
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