| 摘要 |
PROBLEM TO BE SOLVED: To improve the overall control performance of an RF power system.SOLUTION: A radio frequency system includes: a power amplifier that outputs a radio frequency signal to a matching network via a transmission line; a first sensor that monitors the radio frequency signal and generates first sensor signals according to the radio frequency signal; a distortion module that determines a first distortion value according to at least one of (i) a sinusoidal function of the first sensor signals and (ii) a cross-correlation function of the first sensor signals; and a first correction circuit that (i) generates a first impedance tuning value on the basis of the first distortion value and a first predetermined value, and (ii) provides feedforward control of impedance matching performed within the matching network including outputting the first impedance tuning value to the power amplifier and the matching network. |
