发明名称 SAMPLE HOLDER FOR ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a sample holder for electron microscope that has a plurality of sample tables at least one of which is movable and enables a plurality of samples for transmission type electron microscope to be manufactured by a converged ion beam device.SOLUTION: A sample holder 1 is provided with a holder tip opening part 9 at a tip part. Further, the sample holder 1 has a knob 5, a rotating mechanism 6, a rough moving mechanism 7, and a connector 8 at a rear end part. With the knob 5 pressed, the rotating mechanism 6 is released from being fixed and the rear end part and the tip part of the sample holder rotate from the rotating mechanism 6. The rotating mechanism can rotate an arrangement of samples when an observation is made through the transmission type electron microscope and when the samples for transmission type electron microscope are manufactured by the converged ion beam device. Further, sample tables can be moved by the rough moving mechanism 7 and a fine moving mechanism 119.
申请公布号 JP2013152831(A) 申请公布日期 2013.08.08
申请号 JP20120012610 申请日期 2012.01.25
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 TERADA SHOHEI;TANIGUCHI YOSHIFUMI;NAGAKUBO KOHEI
分类号 H01J37/20 主分类号 H01J37/20
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