| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a TiO-SiOglass suitable as a substrate having a small surface roughness.SOLUTION: A method is for manufacturing silica glass containing TiOand having a concentration of TiOof 1-12 mass%, a variation, &Dgr;n, of the refractive index of 2×10in a 30 mm×30 mm range in at least one plane and includes a process of flame-hydrolyzing raw materials for formation of glass to obtain fine particles of glass. |
