发明名称 Split-channel transistor and methods for forming the same
摘要 A Fin Field-Effect Transistor (FinFET) includes a fin, which includes a channel splitter having a first bandgap, and a channel including a first portion and a second portion on opposite sidewalls of the channel splitter. The channel has a second bandgap smaller than the first bandgap. A gate electrode includes a first portion and a second portion on opposite sides of the fin. A gate insulator includes a first portion between the first portion of the gate electrode and the first portion of the channel, and a second portion between the second portion of the gate electrode and the second portion of the channel.
申请公布号 US8604518(B2) 申请公布日期 2013.12.10
申请号 US201113307738 申请日期 2011.11.30
申请人 BHUWALKA KRISHNA KUMAR;DOORNBOS GERBEN;PASSLACK MATTHIAS;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 BHUWALKA KRISHNA KUMAR;DOORNBOS GERBEN;PASSLACK MATTHIAS
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项
地址