| 摘要 |
This spatial light modulator is provided with: a substrate; a fixed electrode disposed on the surface of the substrate; a connecting section, which has one end thereof connected to the surface; a movable section, which is connected to the other end of the connecting section, and which swings with respect to the substrate due to elastic deformation of the connecting section; a supporting post section, which extends in the thickness direction of the substrate with one end of the supporting post section connected to the movable section, and which integrally swings with the movable section; a reflecting member, which is connected to the other end of the supporting post section, and which has a reflecting surface that integrally swings with the movable section and the supporting post section; a movable electrode, which is disposed on the surface of the reflecting member, said surface facing the fixed electrode; and a conductor layer, which is disposed to the supporting post section with a film thickness larger than that of the movable electrode, and which electrically connects between the movable section and the movable electrode. |
