发明名称 |
MULTI-AXIS, LARGE TILT ANGLE, WAFER LEVEL MICROMIRROR ARRAY FOR LARGE SCALE BEAM STEERING APPLICATIONS |
摘要 |
A system 120 for reflecting or redirecting incident light, microwave or sound energy includes a first substrate 144 configured to support an array of reflective elements 130 that can be angularly displaced through a range of substantially 90 degrees in response to a reflector angle control signal and a controller programmed to generate the reflector angle control signal to achieve desired incident energy beam or wavefront re-direction. The reflective elements 130 preferably comprise MEMS micro-reflector elements hingedly or movably attached to the first substrate 130 and define a reflective surface that is aimed at the source of incident light, microwave or sound energy. |
申请公布号 |
US2014078568(A1) |
申请公布日期 |
2014.03.20 |
申请号 |
US201314026468 |
申请日期 |
2013.09.13 |
申请人 |
CORNELL UNIVERSITY |
发明人 |
LAL AMIT;ARDANUC SERHAN M. |
分类号 |
G02B7/182 |
主分类号 |
G02B7/182 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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