发明名称 |
SEED CRYSTAL HOLDER, MANUFACTURING APPARATUS OF CRYSTAL, AND MANUFACTURING METHOD OF CRYSTAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a silicon carbide crystal that can manufacture a high-quality silicon carbide crystal by growing a uniform crystal on the undersurface of a seed crystal in crystal growth of silicon carbide by a solution growth method.SOLUTION: A columnar seed crystal holder 5 is used in a solution growth method in which the undersurface of a seed crystal 4 made of silicon carbide is brought into contact with a solution of carbon and silicon retained in a crucible having an opening on the top edge and then pulled up to grow a silicon carbide crystal from the solution on the undersurface of the seed crystal 4. The seed crystal holder includes a first holder 14 that holds the seed crystal 4 on the undersurface thereof and has a hollow B having an opening in the area exclusive of the periphery of the top surface thereof and a columnar second holder 15 that is fixed to periphery of the top surface of the first holder 14 so as to cover the opening. |
申请公布号 |
JP2014234342(A) |
申请公布日期 |
2014.12.15 |
申请号 |
JP20130118656 |
申请日期 |
2013.06.05 |
申请人 |
KYOCERA CORP |
发明人 |
MASAKI KATSUAKI;MURASE YU;HISAYOSHI YUTAKA |
分类号 |
C30B29/36;C30B19/06 |
主分类号 |
C30B29/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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