| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance functionality and maintainability by making a transmission mechanism, for operating each electron beam column, insertable for a plurality of electron beam columns.SOLUTION: An electron beam device consists of a plurality of electron beam columns including, in a housing, an electron beam optical system for irradiating the sample surface with an electron beam, and a detection system for detecting the electrons generated by irradiation with an electron beam. Each electron beam column has a housing constituted of a large diameter part that is a cylinder having the maximum diameter, and a small diameter part that is a cylinder of smaller diameter than the large diameter part. The electron beam columns are arranged densely so that the large diameter parts of adjacent electron beam columns substantially come into contact with each other. At least one of mechanical transmission mechanism or optical transmission mechanism for transmitting information between the inside and outside of an electron beam column is introduced in the small diameter part of an electron beam column, via a space formed on the outside of an electron beam column by the small diameter parts of adjacent electron beam columns.</p> |
