| 发明名称 | Assemblies for ion and electron sources and methods of use | ||
| 摘要 | Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly. | ||
| 申请公布号 | US8916821(B2) | 申请公布日期 | 2014.12.23 |
| 申请号 | US201012902391 | 申请日期 | 2010.10.12 |
| 申请人 | Perkinelmer Health Sciences, Inc. | 发明人 | Ferrara Keith;Barkus David;Patkin Adam;Mannino Rosario;Pentek Daniel;Delorenzo Frank;Rasmussen Barton |
| 分类号 | H01J49/06;H01J3/38;H01J37/02;H01J49/10;H01J27/02 | 主分类号 | H01J49/06 |
| 代理机构 | Rhodes IP PLC | 代理人 | Rhodes IP PLC ;Rhodes Christopher R |
| 主权项 | 1. A source assembly comprising: a housing configured to receive source components, the housing comprising a first integral alignment feature; and a terminal lens configured to provide a beam, the terminal lens comprising a second integral alignment feature, the terminal lens constructed and arranged to couple to the housing when the first integral alignment feature is coupled to the second integral alignment feature to align the terminal lens with the source components in the housing and retain the source components in the housing. | ||
| 地址 | Waltham MA US | ||