| 摘要 |
PROBLEM TO BE SOLVED: To provide a spatial light modulation unit that is used in an illuminating optical system and is able to improve the degree of freedom in the intensity level of a pupil intensity distribution.SOLUTION: A spatial light modulation unit used in an illuminating optical system, which illuminates a target illumination face with light from a light source, comprises: a spatial light modulator having a plurality of optical elements arrayed in a predetermined plane and controlled independently; a spatial light modulation element that subjects light made incident on from a light source, to spatial light modulation so that, for each of the optical elements, a luminous flux with an intensity level corresponding to the position of each optical element is made incident on; and a control section that independently controls the optical elements on the basis of information about the intensity level of a luminous flux made incident on each of the optical elements. |
