| 摘要 |
PURPOSE:To measure the position, shape and strength of a neutral particle beam by detecting neutral particles scattered in the back, and measuring the neutral particles radiated to a labeled sample from these neutral particles. CONSTITUTION:When neutral particles are radiated to a labeled sample 4, they are scattered in the front or in the back. When slits 6 and 7 and a detector 8 are set at the position for detecting scattered particles, the energy of an H<+> beam 1 radiated to the sample 4 can be known based on the detected energy. The perspective position for slits 6 and 7 and the detector 8 is moved along the longitudinal direction of the sample 4 in sequence by a moving mechanism 10. When the energy of scattered particles 6 is detected at each mobile position, the position where the beam 1 is radiated and the position where no beam is radiated are distinguished, and the diameter of the beam 1 and the position where the beam 1 passes can be determined.
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