PRODUCTION APPARATUS OF CARBON NANOTUBE AND SUPPLY UNIT TO BE ONE PART OF THE PRODUCTION APPARATUS, AS WELL AS PRODUCTION METHOD OF CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a means to enhance productivity of a carbon nanotube produced by a vapor phase catalytic method.SOLUTION: A production apparatus is a production apparatus 10 to produce a carbon nanotube by a vapor phase catalytic method, and includes: a first chamber 14 having a growth region being a region where the carbon nanotube is formed; first temperature adjusting devices 16, 18 being able to adjust temperature of the growth region in the first chamber 14; pressure adjusting devices 23, 24 being able to adjust pressure in the first chamber 14; a first supply device 30 being able to supply a carbon source into the growth region in the first chamber 14; and a first vaporizing device (including a heater 31B) being able to vaporize a liquid L provided in the production apparatus 10, in which the first vaporizing device (including the heater 31B) is able to vaporize the liquid L for the purpose of supplying at least one kind of vapor phase catalyst formed of an iron group element-containing material and a halogen-containing material and contained in the liquid L to the growth region in the first chamber 14.