| 摘要 |
PROBLEM TO BE SOLVED: To provide a normal pressure vapor growth device or piping thereof including, at low cost, a highly-reliable interlock function that can restore pressure in a reaction vessel to normal pressure when an abnormality occurs in the pressure of the reaction vessel.SOLUTION: A normal pressure vapor growth device includes a pressure adjustment line 4b on the way of gas in a reaction vessel 2 reaching a discharge valve 5 that, when an interlock function operates, allows the gas to be discharged from the reaction vessel 2 or allows a nitrogen gas for adjusting pressure in the reaction vessel 2 to flow into the reaction vessel, so as to adjust pressure in the reaction vessel 2. The pressure adjustment line 4b has a zone z where a plurality of ducts into which the line has branched are joined. Each of the ducts is provided with: a first check valve 9 arranged so that the outflow direction of the gas is a forward direction; or a second check valve 10 arranged so that the inflow direction of the nitrogen gas is a forward direction. In the entire of the plurality of ducts, the first and second check valves 9 and 10 are arranged. |
