Pressure transducer substrate with self alignment feature

摘要

In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.

主权项

1. An apparatus comprising:
a first circularly-shaped substrate having:
a first side for accommodating a first diaphragm and a second side, the second side including a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second circularly-shaped substrate, anda supporting area contained in the polygonal-shaped depression, the supporting area providing support for the second diaphragm when a first assembly containing the first circularly-shaped substrate and a second assembly containing the second diaphragm and the second circularly-shaped substrate are stacked.