| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a schedule generating method of a substrate processing apparatus capable of improving throughput in substrate processing for processing a substrate processed by a sheet processing unit that processes a substrate one by one and transporting to a batch processing unit that collectively processes a plurality of substrates and processing the substrate.SOLUTION: Since a start determined time T13 of a batch processing step G1 of a substrate W1 and a start determined time T23 of a batch processing step G2 of a substrate W2 become the same time, the batch processing of the substrate W1 and the batch processing of the substrate W2 may be collectively performed. Thereby, it becomes possible to shorten a period from starting sheet processing of the substrate W1 to finishing batch processing of the substrate W2. As a result, it becomes possible to improve throughput of a substrate processing apparatus 10.</p> |
