发明名称 SUBSTRATE JOINT DEVICE, SUBSTRATE JOINT METHOD, AND STEREOSCOPIC DISPLAY DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a substrate joint device making it possible to precisely joint two substrates while saving costs and space, and a substrate joint method.SOLUTION: With a substrate joint device 10, a lower vacuum chamber 100 includes an upper substrate camera group 120 for imaging an upper substrate 213 fixed on an upper vacuum chamber 200. A first upper substrate alignment mark 213a and a second upper substrate alignment mark 213b on the upper substrate 213 fixed on the upper vacuum chamber 200 are imaged by performance in synchronization with the lower vacuum chamber 100. Such a configuration can achieve space saving and low costs through reduction in the number of mechanical components.</p>
申请公布号 JP2015169787(A) 申请公布日期 2015.09.28
申请号 JP20140044431 申请日期 2014.03.06
申请人 NLT TECHNOLOGIES LTD 发明人 ASAKURA TETSURO;SHIGEMURA KOJI
分类号 G09F9/00;G02B27/22 主分类号 G09F9/00
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