| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a preparation method of a cross section of a sample which can prepare an appointed cross section with a little irradiation frequency when preparing the cross section of the sample by irradiating an ion beam to the sample.SOLUTION: As a preparation step, a sample 10 having a main processing surface 11, an adjacent processing surface 12 and an edge line part 13 formed by the surfaces 11 and 12 is prepared, a part of the main processing surface is covered with a masking shield 30, and an area of an appointed length of the edge line part 13 of the main processing surface is exposed as an exposed surface 11e. Then, a cross section 14 of the sample is prepared by irradiating an ion beam to the exposed surface from a direction which is vertical to the exposed surface and removing an appointed area from the exposed surface to the adjacent processing surface 12 of the sample. The adjacent processing surface is comprised with an inclined surface where an angle with the exposed surface is 91°-95°.</p> |
