发明名称 |
PROCESS FOR TREATMENT BY A BEAM OF MONO- OR MULTICHARGED IONS OF A GAS TO PRODUCE ANTIREFLECTIVE GLASS MATERIALS |
摘要 |
A method of treatment using a beam of singly- and multiply-charged gas ions produced by an electron cyclotron resonance (ECR) source of a glass material in which - the ion acceleration voltage of between 5 kV and 1000 kV is chosen to create an implanted layer of a thickness equal to a multiple of 100 nm; - the ion dose per surface unit in a range of between 1012 ions/cm2 and 1018 ions/cm2 is chosen so as to create an atomic concentration of ions equal to 10 pcnt with a level of uncertainty of (+/-)5 pcnt . Advantageously this makes it possible to obtain materials made from glass that is non-reflective in the visible range. |
申请公布号 |
PH12015501621(A1) |
申请公布日期 |
2015.09.28 |
申请号 |
PH12015501621 |
申请日期 |
2015.07.22 |
申请人 |
QUERTECH |
发明人 |
BUSARDO, DENIS;GUERNALEC, FREDERIC |
分类号 |
C03C23/00 |
主分类号 |
C03C23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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