发明名称 FUNCTIONAL ELEMENT, ELECTRONIC DEVICE, PHYSICAL QUANTITY DETECTION APPARATUS, ELECTRONIC APPARATUS, AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide an electronic device improved in impact resistance while preventing the breakage of a functional element generated by concentration of stress in the case of application of impact.SOLUTION: A gyro element 2 comprises a vibration body 4, beams (first to fourth beams 61, 62, 63 and 64) extending from the vibration body 4, and support parts (a first support part 51 and a second support part 52) connected to the beams and supporting the vibration body 4. The beams are provided with a first curved portion 57 bent in a major arc shape between the vibration body 4 and the support parts and having an opening portion which opens at one side.
申请公布号 JP2015169648(A) 申请公布日期 2015.09.28
申请号 JP20140047292 申请日期 2014.03.11
申请人 SEIKO EPSON CORP 发明人 ICHIKAWA FUMIO
分类号 G01C19/5607;H01L41/053;H01L41/113 主分类号 G01C19/5607
代理机构 代理人
主权项
地址