发明名称 |
FUNCTIONAL ELEMENT, ELECTRONIC DEVICE, PHYSICAL QUANTITY DETECTION APPARATUS, ELECTRONIC APPARATUS, AND MOBILE BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device improved in impact resistance while preventing the breakage of a functional element generated by concentration of stress in the case of application of impact.SOLUTION: A gyro element 2 comprises a vibration body 4, beams (first to fourth beams 61, 62, 63 and 64) extending from the vibration body 4, and support parts (a first support part 51 and a second support part 52) connected to the beams and supporting the vibration body 4. The beams are provided with a first curved portion 57 bent in a major arc shape between the vibration body 4 and the support parts and having an opening portion which opens at one side. |
申请公布号 |
JP2015169648(A) |
申请公布日期 |
2015.09.28 |
申请号 |
JP20140047292 |
申请日期 |
2014.03.11 |
申请人 |
SEIKO EPSON CORP |
发明人 |
ICHIKAWA FUMIO |
分类号 |
G01C19/5607;H01L41/053;H01L41/113 |
主分类号 |
G01C19/5607 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|