| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic cylindrical sputtering target material having a high density and a long length.SOLUTION: A ceramic cylindrical sputtering target material according to the present invention has a length of 500 mm or more and a relative density of 95% or more, and is formed in a one-piece product. Since the ceramic cylindrical sputtering target material is a high-density, one-piece product with a length of 500 mm or more, it eliminates the need to stack a large number of sputtering target materials into a long size. Therefore, in a case of using the ceramic cylindrical sputtering target material of the present invention in a magnetron rotary cathode sputtering apparatus or the like, division parts do not exist in the entire target material or the number of the division parts is small, so occurrence of arcing or particles is low during sputtering. |
