发明名称 半導体装置の製造方法及び半導体装置
摘要 <p>A method for fabricating a semiconductor device is disclosed. The method includes sequentially forming a first semiconductor layer, a second semiconductor layer and a semiconductor cap layer containing a p-type impurity element on a substrate, forming a dielectric layer having an opening after the forming of the semiconductor cap layer, forming a third semiconductor layer containing a p-type impurity element on the semiconductor cap layer exposed from the opening of the dielectric layer, and forming a gate electrode on the third semiconductor layer.</p>
申请公布号 JP5784440(B2) 申请公布日期 2015.09.24
申请号 JP20110213471 申请日期 2011.09.28
申请人 发明人
分类号 H01L21/338;H01L21/205;H01L21/336;H01L29/423;H01L29/49;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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