摘要 |
<p>An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.</p> |
申请人 |
APPLIED MATERIALS, INC.;BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;SCHÜSSLER, UWE;LOPP, ANDREAS |
发明人 |
BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;SCHÜSSLER, UWE;LOPP, ANDREAS |