发明名称 EVAPORATION SOURCE FOR ORGANIC MATERIAL
摘要 <p>An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.</p>
申请公布号 WO2015139776(A1) 申请公布日期 2015.09.24
申请号 WO2014EP55741 申请日期 2014.03.21
申请人 APPLIED MATERIALS, INC.;BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;SCHÜSSLER, UWE;LOPP, ANDREAS 发明人 BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;SCHÜSSLER, UWE;LOPP, ANDREAS
分类号 C23C14/24;C23C14/04 主分类号 C23C14/24
代理机构 代理人
主权项
地址