发明名称 NON-VOLATILE STORAGE DEVICE
摘要 A non-volatile storage device in one embodiment comprises the following: a first conductive layer for which the product of the number of oxygen ions in said layer and the valence (2) of oxygen is less than the product of the number of cations in said layer and the valence of said cations; an insulating film provided so as to contact said first conductive layer; a hafnium-oxide ferroelectric film provided so as to contact the side of the insulating film facing away from the first conductive layer; a second conductive layer, provided so as to contact the side of the ferroelectric film facing away from the insulating film, for which the product of the number of oxygen ions in said layer and the valence (2) of oxygen is less than the product of the number of cations in said layer and the valence of said cations; and a metal-oxide third conductive layer, provided so as to contact the side of the first conductive layer and/or the second conductive layer facing away from the ferroelectric film, for which the product of the number of oxygen ions in said layer and the valence (2) of oxygen is greater than the product of the number of cations in said layer and the valence of said cations.
申请公布号 WO2015141625(A1) 申请公布日期 2015.09.24
申请号 WO2015JP57695 申请日期 2015.03.16
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INO, TSUNEHIRO;FUJII, SHOSUKE
分类号 H01L21/8246;H01L21/316;H01L27/10;H01L27/105 主分类号 H01L21/8246
代理机构 代理人
主权项
地址