HYDROGEN CONTENT RATIO ACQUIRING APPARATUS AND HYDROGEN CONTENT RATIO ACQUIRING METHOD

摘要

In a hydrogen content acquiring apparatus (1), reference information that associates values of a predetermined group of parameters with SiH and SiH 2 contents in a silicon film is generated and stored in advance. By a spectroscopic ellipsometer (3) performing measurement on a silicon film on a glass substrate (9), measured spectra are acquired, and a computer (6) obtains values of the group of parameters from the measured spectra. Then, values of the SiH and SiH 2 contents are accurately obtained based on the values of the group of parameters and the reference information.