Semiconductor devices including substrate layers and overlying semiconductor layers having closely matching coefficients of thermal expansion, and related methods

摘要

Embodiments relate to semiconductor structures and methods of forming semiconductor structures. The semiconductor structures include a substrate layer having a CTE that closely matches a CTE of one or more layers of semiconductor material formed over the substrate layer. In some embodiments, the substrate layers may comprise a composite substrate material including two or more elements. The substrate layers may comprise a metal material and/or a ceramic material in some embodiments.

主权项

1. A method of fabricating a semiconductor substrate, comprising:
depositing a composite substrate layer over a surface of a first semiconductor layer so as to form the composite substrate layer in place over the first semiconductor layer, and forming the composite substrate layer to have a sufficient thickness to form a support substrate with sufficient stiffness to provide structural support to the first semiconductor layer, the entire composite substrate layer is formed by one or more processes selected from the group consisting of a spin-coating process, a blanket coating process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, a plasma spray coating process, an atomic layer deposition (ALD) process, a plasma enhanced ALD process, and a physical vapor deposition (PVD); epitaxially growing at least one additional semiconductor layer over the first semiconductor layer on a side thereof opposite the composite substrate layer; and formulating the composite substrate layer to exhibit a Coefficient of Thermal Expansion (CTE) closely matching a CTE of at least one of the first semiconductor layer and the at least one additional semiconductor layer and reducing or preventing introduction of strain in the at least one of the first semiconductor layer and the at least one additional semiconductor layer due to thermal expansion mismatch with the composite substrate layer; and the composite substrate layer comprises one of a ceramic-ceramic composite material, a metal-ceramic composite material, and a tantalum-tungsten composite material.