| 摘要 |
The pressure to prepare a reference image for pattern matching in advance, when inspecting a substrate using a photographed image, is reduced. When sending back a substrate to a substrate sending back robot, an image inspecting apparatus photographs the relevant substrate, and inspects OK/NG of the substrate by pattern matching using the photographed image. The image inspecting apparatus detects (S4) a pseudo edge in which an edge part is a straight line with respect to a substrate image representing the substrate in the photographed image after processing binarization and closing (S1 to S3) on the photographed image, and generates (S5) the reference image comparing with the photographed image in pattern matching by removing a noise in the substrate image surround by the pseudo edge. The pressure of a work to obtain the reference image in advance is removed by generating the reference image from the photographed image. |
