发明名称 |
Compound semiconductor device and method of manufacturing the same |
摘要 |
A compound semiconductor device includes a substrate, a p-type first semiconductor layer over the substrate and contains antimony, a p-type second semiconductor layer over the first semiconductor layer and contains antimony, an n-type third semiconductor layer over the second semiconductor layer, a fourth semiconductor layer between the first semiconductor layer and the second semiconductor layer, the fourth semiconductor layer containing phosphorus and having a thickness in which electrons tunnel between the first semiconductor layer and the second semiconductor layer, a first electrode in ohmic contact with the first semiconductor layer, and a second electrode in ohmic contact with the third semiconductor layer. The first semiconductor layer is made from a material whose contact resistance with the first electrode is lower than contact resistance of the second semiconductor layer. |
申请公布号 |
US9136401(B2) |
申请公布日期 |
2015.09.15 |
申请号 |
US201414311697 |
申请日期 |
2014.06.23 |
申请人 |
FUJITSU LIMITED |
发明人 |
Takahashi Tsuyoshi |
分类号 |
H01L29/66;H01L29/88;H01L29/205;H01L21/306;H01L29/778;H01L29/06 |
主分类号 |
H01L29/66 |
代理机构 |
Fujitsu Patent Center |
代理人 |
Fujitsu Patent Center |
主权项 |
1. A compound semiconductor device, comprising:
a substrate; a p-type first semiconductor layer over the substrate and contains antimony; a p-type second semiconductor layer over the first semiconductor layer and contains antimony; an n-type third semiconductor layer over the second semiconductor layer; a fourth semiconductor layer between the first semiconductor layer and the second semiconductor layer, the fourth semiconductor layer containing phosphorus and having a thickness in which electrons tunnel between the first semiconductor layer and the second semiconductor layer; a first electrode in ohmic contact with the first semiconductor layer; and a second electrode in ohmic contact with the third semiconductor layer, wherein the first semiconductor layer is made from a material whose contact resistance with the first electrode is lower than contact resistance of the second semiconductor layer. |
地址 |
Kawasaki JP |