Bulk acoustic wave resonator sensor

摘要

A bulk acoustic wave resonator (BAWR) sensor is provided. The BAWR sensor includes a signal BAWR that measures a resonance frequency that is modified due to a reaction with a target material, a reference BAWR that measures a reference resonance frequency without reaction with an external environment, and a sensing unit that senses the target material, based on the modified resonance frequency and the reference resonance frequency.

主权项

1. A bulk acoustic wave resonator (BAWR) sensor, comprising:
a signal BAWR comprising
a first substrate comprising a first via-hole formed in a lower side of the first substrate and a second via-hole formed in the lower side of the first substrate;a first bulk acoustic wave resonance unit comprising a first air cavity formed on a top of the first substrate, a first lower portion electrode formed on top of the first air cavity, a first piezoelectric layer formed on top of the first lower portion electrode, a first upper portion electrode formed one top of the first piezoelectric layer, and a first coated layer, anda first resonance frequency measuring unit configured to measure a resonance frequency modified by the sample using the first lower portion electrode and the first upper portion electrode, wherein the first resonance frequency measuring unit is connected to the first lower portion electrode through a first electrode pad within the first via-hole, and is connected to the first upper portion electrode through a second electrode pad within the second via-hole; a reference BAWR configured to measure a reference resonance frequency without reaction with an external environment; and a sensing unit configured to sense the target material, based on the first modified resonance frequency and the reference resonance frequency.