| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve piezoelectric characteristics in a method of manufacturing a piezoelectric element by printing a paste material including lead-based piezoelectric material powder, a binder and a solvent on a substrate, and burning it. <P>SOLUTION: The paste material for forming a piezoelectric layer 4 is printed to a desired thickness divisionally in a plurality of layers (41 to 43), and the paste material is prepared so that layers on outer sides during the burning among the plurality of paste layers 41 to 43 which are laminated, i.e. the lower layer-side paste layer 41 in contact with a lower electrode 5 and the surface layer(upper electrode 6)-side paste layer 43 exposed to the outside contain lead more than the paste layer 42 on an inner side. Therefore, while deterioration in piezoelectric characteristics due to lead missing from a part where lead is likely to be missing owing to the burning is prevented, a composition of the intermediate layer part is put close to a stoichiometric composition to improve the piezoelectric characteristics. <P>COPYRIGHT: (C)2012,JPO&INPIT |
