Piezoelectric resonator plate, piezoelectric resonator, method for manufacturing piezoelectric resonator plate, and method for manufacturing piezoelectric resonator

摘要

A piezoelectric resonator plate includes at least a pair of excitation electrodes and at least a pair of extraction electrodes. The pair of extraction electrodes are respectively extracted from the pair of excitation electrodes to electrically and mechanically bond the pair of excitation electrodes to an external electrode. The pair of extraction electrodes each include a distal end portion. The distal end portion includes a connecting electrode extracted to a vicinity of one end portion on one principal surface of the piezoelectric resonator plate. The connecting electrodes each include a top surface where a first metal film to be bonded to the external electrode is formed. The first metal film includes a top surface with two or more protruding portions. The first metal film has a larger surface roughness and a smaller area compared with the respective connecting electrodes. The protruding portions are formed with cross-sections in curvature shapes.

主权项

1. A piezoelectric resonator plate comprising:
at least a pair of excitation electrodes; and at least a pair of extraction electrodes that are respectively extracted from the pair of excitation electrodes to electrically and mechanically bond the pair of excitation electrodes to an external electrode, wherein the pair of extraction electrodes each include a distal end portion, the distal end portion including a connecting electrode extracted to a vicinity of one end portion on one principal surface of the piezoelectric resonator plate, the connecting electrodes each include a top surface where a first metal film to be bonded to the external electrode is formed, the first metal film has a larger surface roughness and a smaller area compared with the respective connecting electrodes, the first metal film including a to surface with two or more protruding portions, the protruding portions are formed with cross-sections in curvature shapes, and
the top surface of the first metal film includes two or more protruding portions along a top surface end portion of the first metal film excluding a center region on the top surface of the first metal film.