发明名称 THREE-DIMENSIONAL MEASURING MACHINE AND CORRECTION MATRIX CALCULATION METHOD BY THREE-DIMENSIONAL MEASURING MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a three-dimensional measuring machine capable of reducing calculation time by facilitating calculation of a correction matrix for correcting a probe detection value. ! SOLUTION: A correction matrix calculation part of a three-dimensional measuring machine includes: a first correction component calculation processing part for calculating a diagonal component of a correction matrix, based on a first detection value by a measurement value displacement detection part of a probe and a second detection value by a scale part acquired by a measurement for moving a calibrating reference body and the probe relatively in a normal line direction so as to bring a measuring probe of the probe into contact with the surface of the calibrating reference body at one point from a normal line direction on the surface of the calibrating reference body; and a second correction component calculation processing part for calculating a non-diagonal component of a correction matrix, based on a third
申请公布号 JP2015158387(A) 申请公布日期 2015.09.03
申请号 JP20140032300 申请日期 2014.02.21
申请人 MITSUTOYO CORP 发明人 NAKAGAWA HIDEYUKI ; ISHIKAWA SANEHIRO
分类号 G01B5/00 主分类号 G01B5/00
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