HIGHLY ABSORBING LAYER SYSTEM, METHOD FOR PRODUCING THE LAYER SYSTEM AND SUITABLE SPUTTERING TARGET THEREFOR

摘要

The invention relates to a light absorbing layer system consisting of at least two layers, one of which is an anti-reflective layer which faces an observer and which is made from a dielectric material, and at least one other layer is an absorbing layer facing away from the observer and is made from an oxide or from an oxynitride having a sub-stoichiometric oxygen content. Said layer system has a wavelength range of between 380 - 780nm including a visual transmission Tv of less than 1% and a visual reflection Rv of less than 6% and is characterised by a kappa absorption index of at least 0.70 with a wavelength of 550 mn.