发明名称 Optical system and optical quality measuring apparatus
摘要 An optical system (10) comprising: a light source (100, 200); a photodetector (400); a first light-receiving system (103) for causing the photodetector (400) to receive first reflected light with a first angle of reflection from a surface (500); and a second light-receiving system (203) for causing the photodetector (400) to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface (500) is provided. Here, a first light-receiving area (120) of the photodetector (400) with respect to light, of reflected light from the surface (500), via the first light-receiving system (103) is spaced apart from a second light-receiving area (220) of the photodetector (400) with respect to light, of the reflected light from the surface (500), via the second light-receiving system (203).
申请公布号 EP2913659(A1) 申请公布日期 2015.09.02
申请号 EP20150156856 申请日期 2015.02.27
申请人 CANON KABUSHIKI KAISHA 发明人 SEKI, TAKASHI;YUKI, HIROYUKI
分类号 G01N21/57 主分类号 G01N21/57
代理机构 代理人
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