发明名称 DICING-SHEET SUBSTRATE FILM AND DICING SHEET
摘要 A dicing sheet base film (2) includes a resin layer (A). The resin layer (A) contains: a norbornene-based resin (a1) that is a thermoplastic resin containing a structural unit derived from a norbornene-based compound; a styrene-based elastomer (a2); and an olefin-based thermoplastic resin (a3) other than the norbornene-based resin (a1) and other than the styrene-based elastomer (a2). The dicing sheet base film (2) suppresses the occurrence of dicing debris, in particular filament-like dicing debris, during the dicing of a cut object without imparting physical energy such as electron rays and ³ rays, and has sufficient expandability in the expanding process.
申请公布号 KR20150099768(A) 申请公布日期 2015.09.01
申请号 KR20157017932 申请日期 2013.10.09
申请人 LINTEC CORPORATION 发明人 TAYA NAOKI;UEDA MASASHI;ITO MASAHARU
分类号 H01L21/683;H01L21/78 主分类号 H01L21/683
代理机构 代理人
主权项
地址