Noise shielding techniques for ultra low current measurements in biochemical applications

摘要

A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.

主权项

1. A device having an integrated well, comprising:
a plurality of vertical structures substantially surrounding a semiconductor device; an opening above the semiconductor device substantially filled with a conductive fluid; more than one conductive layers forming a portion of the integrated well; and an oxide layer between the more than one conductive layers, and wherein the oxide layer is configured to form a capacitor.