GAS LASER OSCILLATOR CONTROLLING ADJUSTED LEVEL OF LASER POWER SUPPLY

摘要

A gas laser oscillator including discharge tubes, main discharge electrodes, auxiliary electrodes, an output mirror which outputs a laser, and a mechanical shutter which cuts off the laser output from the output mirror. To maintain the auxiliary discharge in the state where the laser output is zero, the base discharge command is set to a first command value when the mechanical shutter is closed, and is set to a second command value smaller than the first command value when the mechanical shutter is opened.

主权项

1. A gas laser oscillator comprising
a plurality of discharge tubes through which a laser gas circulates, a plurality of main discharge electrodes which are arranged corresponding to the plurality of discharge tubes and which make main discharge start for discharge excitation of said laser gas, a plurality of auxiliary electrodes which are arranged adjoining the plurality of main discharge electrodes and which make auxiliary discharge start in said laser gas in a state lower than the output by which said main discharge starts, an output mirror which outputs a laser which is oscillated at said plurality of discharge tubes, and a mechanical shutter which cuts off the laser output from the output mirror, wherein a base command for maintaining said auxiliary discharge in the state where the laser output is zero is set to a first command value when said mechanical shutter is closed, and is set to a second command value smaller than said first command value when said mechanical shutter is opened.