| 摘要 |
To relatively easily control energy to be supplied to plasma positioning at a center of a target, a target shell supply device 3 that supplies a target shell Tg1 to a chamber 2, a target shell monitoring device 4 that monitors an attitude and a position of the target shell Tg1, a compression laser output device 5a that irradiates the target shell Tg1 with a compression laser light LS1, and a heating laser output device 6 that irradiates the target shell Tg1 with a heating laser light LS3 following the compression laser light LS1 are provided. The target shell Tg1 has a hollow spherical shell shape, includes an approximately spherical space Sp on an inner side thereof, includes at least one through hole H1 connecting an outer side thereof and the space Sp, and includes, on an outer surface Sf1 thereof, irradiation areas Ar1 and Ar2 to be irradiated with compression laser lights. |
